CMOS (complementary metal oxide semiconductor) devices having metal gate NFETS and poly-silicon gate PFETS

ABSTRACT

A semiconductor structure fabrication method. The method includes providing a structure which includes (a) first and second semiconductor regions, (b) first and second gate dielectric regions on the first and second semiconductor regions, respectively, (c) a high-K dielectric region on the first gate dielectric region, K being greater than 4, (d) an electrically conductive layer on the high-K dielectric region, (e) a poly-silicon layer on the electrically conductive layer and the second gate dielectric region, and (f) a hard mask layer on the poly-silicon layer. The hard mask layer is patterned resulting in first and second hard mask regions. The poly-silicon layer is etched with the first and second hard mask regions as blocking masks resulting in first and second poly-silicon regions. The first and second poly-silicon regions are exposed to a surrounding ambient.

FIELD OF THE INVENTION

The present invention relates generally to CMOS (Complementary Metal Oxide Semiconductor) devices and more particularly to CMOS devices having metal gate NFETs (n-channel field effect transistors) and poly-silicon gate PFETs (p-channel field effect transistors).

BACKGROUND OF THE INVENTION

A conventional CMOS device includes an NFET and a PFET electrically coupled together in series. It is known that the operation of the CMOS device would be improved if the NFET has a metal gate electrode and the PFET has a poly gate electrode. Therefore, there is a need for a method for forming a CMOS device having a metal gate NFET and a poly-silicon gate PFET.

SUMMARY OF THE INVENTION

The present invention provides a semiconductor structure fabrication method, comprising providing a structure which includes (a) a first semiconductor region and a second semiconductor region, (b) a first gate dielectric region on the first semiconductor region and a second gate dielectric region on the second semiconductor region, (c) a high-K dielectric region having a dielectric constant K on the first gate dielectric region, K being greater than 4, (d) an electrically conductive layer on the high-K dielectric region, (e) a poly-silicon layer on the electrically conductive layer and the second gate dielectric region, and (f) a hard mask layer on the poly-silicon layer, wherein the second semiconductor region includes a first top surface shared by the second semiconductor region and the second gate dielectric region, and wherein the first top surface defines a reference direction perpendicular to the first top surface and pointing from inside to outside of the second semiconductor region; patterning the hard mask layer resulting in a first hard mask region and a second hard mask region; and etching the poly-silicon layer with the first and second hard mask regions as blocking masks until a second top surface of the electrically conductive layer and a third top surface of the second gate dielectric region are exposed to a surrounding ambient resulting in a first poly-silicon region and a second poly-silicon region, wherein the first poly-silicon region and the second poly-silicon region are exposed to a surrounding ambient.

The present invention provides a method for forming a CMOS device having a metal gate NFET and a poly-silicon gate PFET.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A-1H show cross-section views used to illustrate a fabrication process of a semiconductor structure, in accordance with embodiments of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

FIGS. 1A-1H show cross-section views used to illustrate a fabrication process of a semiconductor structure 100, in accordance with embodiments of the present invention. More specifically, with reference to FIG. 1A, the fabrication process of the semiconductor structure 100 starts with the semiconductor structure 100 of FIG. 1A. The semiconductor structure 100 comprises a silicon substrate 110, an STI (shallow trench isolation) region 112 in the silicon substrate 110, gate dielectric regions 114 a and 114 b on the silicon substrate 110, and a high-K dielectric region 118 on the gate dielectric region 114 a, as shown in FIG. 1A. The silicon substrate 110 comprises silicon regions 110 a and 110 b, wherein an nFET (n-channel field effect transistor) is to be formed on the silicon region 110 a and a pFET (p-channel field effect transistor) is to be formed on the silicon region 110 b. The gate dielectric regions 114 a and 114 b can be collectively referred to as a gate dielectric layer 114 a+114 b.

In one embodiment, the STI region 112 and the gate dielectric regions 114 a and 114 b comprise silicon dioxide. The high-K dielectric region 118 can comprise a high-K dielectric material, wherein K is dielectric constant. The high-K material has dielectric constant greater than 3.9 (which is dielectric constant of silicon dioxide). In one embodiment, the dielectric region 118 comprises hafnium oxide (K=25).

In one embodiment, the structure 100 further comprises an electrically conductive region 120 on the high-K dielectric region 118, an amorphous silicon region 130 on the electrically conductive region 120, and a first poly-silicon region 140 on the gate dielectric region 114 b. The structure 100 also comprises a second poly-silicon layer 150 on the amorphous silicon region 130 and the first poly-silicon region 140, a hard mask layer 160 on the second poly-silicon region 150, and photoresist regions 170 a and 170 b on the hard mask layer 160. The second poly-silicon layer 150 comprises a doped poly-silicon region 152. In one embodiment, the doped poly-silicon region 152 comprises n-type dopants. The electrically conductive region 120 can comprise titanium nitride. The hard mask layer 160 can comprise silicon nitride.

In one embodiment, the entire photoresist region 170 a overlaps the silicon region 110 a in a direction defined by an arrow 175 (also called the direction 175). The arrow 175 is perpendicular to the top surface 110′ of the silicon substrate 110. It is said that the entire photoresist region 170 a overlaps the silicon region 110 a in the direction 175 if, for any point of the photoresist region 170 a, a straight line going through that point and being parallel to the direction 175 would intersect the silicon region 110 b. In one embodiment, the entire photoresist region 170 b overlaps the silicon region 110 b in the direction 175.

In one embodiment, the structure 100 of FIG. 1A is formed using the processes described in the U.S. Pat. No. 6,902,969, which is hereby incorporated into this present application by reference.

Next, after the structure 100 of FIG. 1A is formed, in one embodiment, the hard mask layer 160 and then the second poly-silicon layer 150 are etched resulting in the structure 100 of FIG. 1B. More specifically, the hard mask layer 160 and the second poly-silicon layer 150 can be anisotropically etched in a direction opposite to the direction 175 with CxFy chemistry using the photoresist regions 170 a and 170 b as blocking masks. The hard mask layer 160 and the second poly-silicon layer 150 are etched until the doped poly-silicon region 152 is completely etched through. In other words, the top surface 150′ of the second poly-silicon 150 after the etching of the hard mask layer 160 and the second poly-silicon layer 150 is at the same level as or a lower level than the bottom surface 152′ of the doped poly-silicon region 152 in the direction 175. It should be noted that, as shown in FIG. 1B, the top surface 150′ of the second poly-silicon 150 is at the same level as the bottom surface 152′ of the doped poly-silicon region 152. After the etching of the hard mask layer 160 and the second poly-silicon layer 150 is performed, the remaining portions of the hard mask layer 160 are hard mask regions 160 a and 160 b, as shown in FIG. 1B.

Next, with reference to FIG. 1B, in one embodiment, the photoresist regions 170 a and 170 b are removed resulting in the structure 100 of FIG. 1C. More specifically, the photoresist regions 170 a and 170 b can be removed using in-situ oxygen plasma etching process followed by a wet clean process.

Next, with reference to FIG. 1C, in one embodiment, the second poly-silicon layer 150, the amorphous silicon region 130, and the first poly-silicon region 140 are etched such that the top surfaces 120′ and 114 b′ of the electrically conductive region 120 and the gate dielectric layer 114 b, respectively, are exposed to the surrounding ambient resulting in the structure 100 of FIG. 1D. More specifically, the second poly-silicon layer 150, the amorphous silicon region 130, and the first poly-silicon region 140 can be anisotropically etched in the direction opposite to the direction 175 using the hard mask regions 160 a and 160 b as blocking masks. After the etching of the second poly-silicon layer 150, the amorphous silicon region 130, and the first poly-silicon region 140 is performed, the remaining portions of the second poly-silicon layer 150 directly beneath the hard mask regions 160 a and 160 b are poly-silicon regions 150 a and 150 b, respectively. As a result of the etching the second poly-silicon layer 150, the amorphous silicon region 130, and the first poly-silicon region 140, the entire silicon region 150 a and the entire amorphous silicon region 130 overlap the hard mask region 160 a, whereas the entire silicon region 150 a and the entire first poly-silicon region 140 overlap the hard mask region 160 b.

Next, with reference to FIG. 1E, in one embodiment, a photoresist region 180 is formed on the structure 100 of FIG. 1D such that the hard mask region 160 b, the poly-silicon regions 150 b and 140, and the gate dielectric region 114 b are covered by the photoresist region 180, whereas the hard mask region 160 a, the doped poly-silicon region 152, the poly-silicon region 150 a, the amorphous silicon region 130, and the electrically conductive region 120 are not covered by the photoresist region 180. In other words, the entire hard mask region 160 b, the entire poly-silicon regions 150 b and 140, and the entire gate dielectric region 114 b overlap the photoresist region 180 in the direction 175, whereas the hard mask region 160 a, the doped poly-silicon region 152, the poly-silicon region 150 a, the amorphous silicon region 130, and the electrically conductive region 120 do not overlap the photoresist region 180 in the direction 175. A first region is said to not overlap a second region in a reference direction if, for any point of the first region, a straight line going through that point and being parallel to the reference direction would not intersect the second region.

Next, in one embodiment, the electrically conductive region 120 and the high-K dielectric region 118 are etched until the top surface 114 a′ of the gate dielectric region 114 a is exposed to the surrounding ambient resulting in the structure 100 of FIG. 1F. More specifically, the electrically conductive region 120 and the high-K dielectric region 118 can be anisotropically etched in the direction opposite to the direction 175 using the hard mask region 160 a as a blocking mask.

Next, with reference to FIG. 1F, in one embodiment, the photoresist region 180 is removed resulting in the structure 100 of FIG. 1G. More specifically, the photoresist region 180 can be removed by ex-situ nitrogen/hydrogen gas mix plasma etching process.

Next, with reference to FIG. 1G, in one embodiment, the hard mask regions 160 a and 160 b are removed resulting in the structure 100 of FIG. 1H. More specifically, the hard mask regions 160 a and 160 b can be removed by a wet clean process. After that, the structure 100 can undergo a post high K metal gate etch wet clean.

Next, with reference to FIG. 1H, in one embodiment, source/drain regions (not shown) of the nFET are formed in the silicon region 110 a. The source/drain regions of the nFET can be doped with n-type dopants. After that, source/drain regions (not shown) of the pFET are formed in the silicon region 110 b. The source/drain regions of the pFET can be doped with p-type dopants. It should be noted that the nFET is a metal gate nFET because it has a metal gate electrode region 120 which comprises titanium nitride (a metal), whereas the pFET is a poly gate pFET because it has a poly gate electrode 140+150 b which comprises poly-silicon. It should be noted that the nFET and pFET can be electrically connected to form a CMOS (Complementary Metal Oxide Semiconductor) device.

In summary, described above is the fabrication process of the structure 100 which has an nFET and a pFET, wherein the nFET is a metal gate nFET and the pFET is a poly gate pFET.

While particular embodiments of the present invention have been described herein for purposes of illustration, many modifications and changes will become apparent to those skilled in the art. Accordingly, the appended claims are intended to encompass all such modifications and changes as fall within the true spirit and scope of this invention. 

1. A semiconductor structure fabrication method, comprising: providing a structure which includes (a) a first semiconductor region and a second semiconductor region, (b) a first gate dielectric region on top of the first semiconductor region and a second gate dielectric region on top of the second semiconductor region, (c) a high-K dielectric region having a dielectric constant K on top of the first gate dielectric region, K being greater than 4, (d) an electrically conductive layer on top of the high-K dielectric region, (e) a poly-silicon layer on top of the electrically conductive layer and the second gate dielectric region, and (f) a hard mask layer on top of the poly-silicon layer, wherein the second semiconductor region includes a first top surface shared by the second semiconductor region and the second gate dielectric region, and wherein the first top surface defines a reference direction perpendicular to the first top surface and pointing from inside to outside of the second semiconductor region; patterning the hard mask layer resulting in a first hard mask region and a second hard mask region; and etching the poly-silicon layer with the first and second hard mask regions as blocking masks until a second top surface of the electrically conductive layer and a third top surface of the second gate dielectric region are exposed to a surrounding ambient resulting in a first poly-silicon region and a second poly-silicon region, wherein the first poly-silicon region and the second poly-silicon region are exposed to a surrounding ambient, wherein said patterning the hard mask layer comprises: forming a first photoresist region and a second photoresist region on top of and in direct physical contact with the hard mask layer, wherein the entire first photoresist region overlaps the first semiconductor region in the reference direction, and wherein the entire second photoresist region overlaps the second semiconductor region in the reference direction; and patterning the hard mask layer with the first and second photoresist regions as blocking masks resulting in the first and second hard mask regions.
 2. A semiconductor structure fabrication method, comprising: providing a structure which includes (a) a first semiconductor region and a second semiconductor region, (b) a first gate dielectric region on top of the first semiconductor region and a second gate dielectric region on top of the second semiconductor region, (c) a high-K dielectric region having a dielectric constant K on top of the first gate dielectric region, K being greater than 4, (d) an electrically conductive layer on top of the high-K dielectric region, (e) a poly-silicon layer on top of the electrically conductive layer and the second gate dielectric region, and (f) a hard mask layer on top of the poly-silicon layer, wherein the second semiconductor region includes a first top surface shared by the second semiconductor region and the second gate dielectric region, and wherein the first top surface defines a reference direction perpendicular to the first top surface and pointing from inside to outside of the second semiconductor region; patterning the hard mask layer resulting in a first hard mask region and a second hard mask region; and etching the poly-silicon layer with the first and second hard mask regions as blocking masks until a second top surface of the electrically conductive layer and a third top surface of the second gate dielectric region are exposed to a surrounding ambient resulting in a first poly-silicon region and a second poly-silicon region, wherein the first poly-silicon region and the second poly-silicon region are exposed to a surrounding ambient; after said etching the poly-silicon layer with the first and second hard mask regions as blocking masks is performed, patterning the electrically conductive layer and the high-K dielectric region with the first hard mask region as a blocking mask until a fifth top surface of the first gate dielectric region is exposed to the surrounding ambient resulting in an electrically conductive region and a high-K dielectric portion, respectively; after said patterning the electrically conductive layer and the high-K dielectric region is performed, forming a first source/drain region and a second source/drain region in the first semiconductor region; and forming a third source/drain region and a fourth source/drain region in the second semiconductor region, wherein the first and second source/drain regions are doped n-type, wherein the third and fourth source/drain regions are doped p-type, and wherein the doped poly-silicon region is doped n-type.
 3. A semiconductor structure fabrication method, comprising: providing a structure which includes (a) a first semiconductor region and a second semiconductor region, (b) a first gate dielectric region on top of the first semiconductor region, a second gate dielectric region on top of the second semiconductor region, (c) a high-K dielectric region having a dielectric constant K on top of the first gate dielectric region, K being greater than 4, (d) an electrically conductive layer on top of the high-K dielectric region, (e) a poly-silicon layer on top of the electrically conductive layer and the second gate dielectric region, and (f) a hard mask layer on top of the poly-silicon layer, wherein the second semiconductor region includes a first top surface shared by the second semiconductor region and the second gate dielectric region, and wherein the first top surface defines a reference direction perpendicular to the first top surface and pointing from inside to outside of the second semiconductor region; patterning the hard mask layer resulting in a first hard mask region and a second hard mask region; and etching the poly-silicon layer with the first and second hard mask regions as blocking masks until a second top surface of the electrically conductive layer and a third top surface of the second gate dielectric region are exposed to a surrounding ambient resulting in a first poly-silicon region and a second poly-silicon region, wherein the first poly-silicon region and the second poly-silicon region are exposed to the surrounding ambient, and wherein said patterning the hard mask layer comprises: forming a first photoresist region and a second photoresist region on top of the hard mask layer, wherein the entire first photoresist region overlaps the first semiconductor region in the reference direction, and wherein the entire second photoresist region overlaps the second semiconductor region in the reference direction; and patterning the hard mask layer with the first and second photoresist regions as blocking masks resulting in the first and second hard mask regions; and after said etching the poly-silicon layer with the first and second hard mask regions as blocking masks is performed, patterning the electrically conductive layer and the high-K dielectric region with the first hard mask region as a blocking mask until a fifth top surface of the first gate dielectric region is exposed to the surrounding ambient resulting in an electrically conductive region and a high-K dielectric portion, respectively; after said patterning the electrically conductive layer and the high-K dielectric region is performed, forming a first source/drain region and a second source/drain region in the first semiconductor region; and forming a third source/drain region and a fourth source/drain region in the second semiconductor region, wherein the first and second source/drain regions are doped n-type, wherein the third and fourth source/drain regions are doped p-type, and wherein the doped poly-silicon region is doped n-type.
 4. The method of claim 1, wherein the structure further includes an amorphous silicon region which is sandwiched between and in direct physical contact with the poly-silicon layer and the electrically conductive layer.
 5. The method of claim 1, further comprising: after said patterning the hard mask layer is performed and before said etching the poly-silicon layer with the first and second hard mask regions as blocking masks is performed, etching the poly-silicon layer with the first and second photoresist regions as blocking masks; and removing the first and second photoresist regions.
 6. The method of claim 1, further comprising, after said etching the poly-silicon layer with the first and second hard mask regions as blocking masks is performed, patterning the electrically conductive layer and the high-K dielectric region with the first hard mask region as a blocking mask until a fifth top surface of the first gate dielectric region is exposed to the surrounding ambient resulting in an electrically conductive region and a high-K dielectric portion, respectively.
 7. The method of claim 5, wherein the poly-silicon layer comprises a doped poly-silicon region, wherein the doped poly-silicon region is in direct physical contact with the hard mask layer, wherein the entire first photoresist region overlaps the doped poly-silicon region in the reference direction, and wherein the second photoresist region does not overlap the doped poly-silicon region in the reference direction.
 8. The method of claim 6, further comprising, after said patterning the electrically conductive layer and the high-K dielectric region is performed, forming a first source/drain region and a second source/drain region in the first semiconductor region; and forming a third source/drain region and a fourth source/drain region in the second semiconductor region, wherein the first and second source/drain regions are doped n-type, wherein the third and fourth source/drain regions are doped p-type, and wherein the doped poly-silicon region is doped n-type.
 9. The method of claim 7, wherein said etching the poly-silicon layer with the first and second photoresist regions as blocking masks is performed until a bottom surface of the doped poly-silicon region is at a higher level than a fourth top surface of the poly-silicon layer in the reference direction.
 10. The method of claim 2, wherein the structure further includes an amorphous silicon region which is sandwiched between and in direct physical contact with the poly-silicon layer and the electrically conductive layer.
 11. The method of claim 2, wherein said patterning the hard mask layer comprises: forming a first photoresist region and a second photoresist region on top of the hard mask layer, wherein the entire first photoresist region overlaps the first semiconductor region in the reference direction, and wherein the entire second photoresist region overlaps the second semiconductor region in the reference direction; and patterning the hard mask layer with the first and second photoresist regions as blocking masks resulting in the first and second hard mask regions.
 12. The method of claim 2, wherein said patterning the electrically conductive layer and the high-K dielectric region comprises: covering the second hard mask region, the second poly-silicon region, and the second gate dielectric region; and etching the electrically conductive layer and the high-K dielectric region with the first hard mask region as a blocking mask until the fifth top surface of the first gate dielectric region is exposed to the surrounding ambient resulting in the electrically conductive region and the high-K dielectric portion, respectively.
 13. The method of claim 2, wherein the electrically conductive layer comprises titanium nitride.
 14. The method of claim 2, wherein the high-K dielectric region comprises hafnium oxide.
 15. The method of claim 2, wherein the first and second gate dielectric regions comprise silicon dioxide.
 16. The method of claim 11, further comprising: after said patterning the hard mask layer is performed and before said etching the poly-silicon layer with the first and second hard mask regions as blocking masks is performed, etching the poly-silicon layer with the first and second photoresist regions as blocking masks; and removing the first and second photoresist regions.
 17. The method of claim 16, wherein the poly-silicon layer comprises a doped poly-silicon region, wherein the doped poly-silicon region is in direct physical contact with the hard mask layer, wherein the entire first photoresist region overlaps the doped poly-silicon region in the reference direction, and wherein the second photoresist region does not overlap the doped poly-silicon region in the reference direction.
 18. The method of claim 17, wherein said etching the poly-silicon layer with the first and second photoresist regions as blocking masks is performed until a bottom surface of the doped poly-silicon region is at a higher level than a fourth top surface of the poly-silicon layer in the reference direction.
 19. The method of claim 3, wherein the structure further includes an amorphous silicon region which is sandwiched between and in direct physical contact with the poly-silicon layer and the electrically conductive layer.
 20. The method of claim 3, further comprising: after said patterning the hard mask layer is performed and before said etching the poly-silicon layer with the first and second hard mask regions as blocking masks is performed, etching the poly-silicon layer with the first and second photoresist regions as blocking masks; and removing the first and second photoresist regions.
 21. The method of claim 3, wherein said patterning the electrically conductive layer and the high-K dielectric region comprises: covering the second hard mask region, the second poly-silicon region, and the second gate dielectric region; and etching the electrically conductive layer and the high-K dielectric region with the first hard mask region as a blocking mask until the fifth top surface of the first gate dielectric region is exposed to the surrounding ambient resulting in the electrically conductive region and the high-K dielectric portion.
 22. The method of claim 3, wherein the electrically conductive layer comprises titanium nitride.
 23. The method of claim 3, wherein the high-K dielectric region comprises hafnium oxide.
 24. The method of claim 20, wherein the poly-silicon layer comprises a doped poly-silicon region, wherein the doped poly-silicon region is in direct physical contact with the hard mask layer, wherein the entire first photoresist region overlaps the doped poly-silicon region in the reference direction, and wherein the second photoresist region does not overlap the doped poly-silicon region in the reference direction.
 25. The method of claim 24, wherein said etching the poly-silicon layer with the first and second photoresist regions as blocking masks is performed until a bottom surface of the doped poly-silicon region is at a higher level than a fourth top surface of the poly-silicon layer in the reference direction. 